Selecting the Right Vacuum Chambers
Vacuum chambers usually consist of a series of components such as a chamber, hearth support [or base plate], power feed through, flanges or collars and other components that together provide a complete vacuum chamber.
Complex vacuum chambers are often designed and fabricated on a custom basis to meet an end-user's application requirements. Used vacuum systems can be easily modified to meet these specifications if the starting vacuum chamber is reasonably close in size.
Glove boxes, welding chambers, de-binder chambers, ovens, furnaces and coating chambers are vacuum chambers engineered for specific applications. Glove boxes typically operate in the rough to low vacuum range for welding, degassing plastics, epoxy, composite laminates or encapsulating components.
Vacuum Chambers are part of the complete vacuum system, which includes the vacuum chamber, power, gas, water, and vacuum feed throughs, view ports, vacuum sensors, control instruments, vacuum gauges, deposition monitoring and systems, evaporation sources and materials, sputtering targets, specialized vacuum pumps, flanges, fittings and vacuum valves for plasma etching equipment, ion implanters, and vacuum furnaces
A base plate is a large flanged adapter that connects the lower section of a chamber or bell jar to the pumping stack or system. Base plates usually have a centrally located port or flange connection that may be connected to a vacuum pumping system.
Vacuum ranges for vacuum chambers and components can be rough or low, (< 760, > 1 torr), medium (< 1, >10-3 torr), high vacuum (< 10-3, >10-8 torr), ultra-high vacuum (< 10-8 torr), and elevated pressures (> 760 torr). The nominal size, width or outer diameter of the chamber is the most important dimension specification. Standard diameters for bell jars and cylindrical chambers are 12", 14", 18" and 24".
Features common to vacuum chambers and components are flange and fitting choices, polished or electro-polished surfaces, openings or feed through ports, heaters, and cooling options.
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